FSGP-M Growth

The Fast Sublimation Growth Process – Monocrystalline (FSGP-M) system was developed to meet the stringent requirements with respect to doping concentration control, planar defects and point defects of fluorescent SiC material.

FSGP-M distinguishes itself from Physical Vapor Transport (PVT) by:

  • Step flow growth being the dominant growth mechanism during the whole growth session and over the whole substrate,
  • Direct molecular transport (DMT) for supply of growth species,
  • Growth at lower temperature.

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